Pore Characterization in Low-k Dielectric Films Using X-ray Reflectivity

Pore Characterization in Low-k Dielectric Films Using X-ray Reflectivity

X-ray Porosimetry

Printed Ephemera - 2004
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Publisher: [Gaithersburg, Md.] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2004]
Branch Call Number: C 13.10:960-13
Characteristics: 1 online resource (xiii, 58 p.) : ill

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